Agnès Roussy

According to our database, Agnès Roussy authored at least 6 papers between 2016 and 2021.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2021

Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines.

Ilham Rabhi, Agnès Roussy, François Pasqualini, Cyril Alegret

Proceedings of the 17th IEEE International Conference on Automation Science and Engineering, 2021

Virtual metrology for semiconductor manufacturing: Focus on transfer learning.

Rebecca Clain, Valeria Borodin, Michel Juge, Agnès Roussy

Proceedings of the 17th IEEE International Conference on Automation Science and Engineering, 2021

2020

A Structure Data-Driven Framework for Virtual Metrology Modeling.

Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco S. Reis

IEEE Trans Autom. Sci. Eng., 2020

A physics-informed Run-to-Run control framework for semiconductor manufacturing.

Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco S. Reis

Expert Syst. Appl., 2020

2018

Virtual Metrology Modeling based on Gaussian Bayesian Network.

Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco S. Reis, Jacques Pinaton

Proceedings of the 2018 Winter Simulation Conference, 2018

2016

Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing.

Jakey Blue, Agnès Roussy, Jacques Pinaton

Proceedings of the Winter Simulation Conference, 2016