Adrian B. Johnston
According to our database1,
Adrian B. Johnston
authored at least 4 papers
between 2013 and 2018.
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Bibliography
2018
A Methodology for Efficient Dynamic Spatial Sampling and Reconstruction of Wafer Profiles.
IEEE Trans Autom. Sci. Eng., 2018
2014
Proceedings of the 2014 IEEE International Conference on Automation Science and Engineering, 2014
Proceedings of the 2014 IEEE International Conference on Automation Science and Engineering, 2014
2013
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes.
Proceedings of the 2013 IEEE International Conference on Automation Science and Engineering, 2013