A. Zacharias

According to our database1, A. Zacharias authored at least 3 papers in 1970.

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Bibliography

1970
Device photolithography: The primary pattern generator part IV-alignment and performance evaluation.
Bell Syst. Tech. J., 1970

Device photolithography: The primary pattern generator part iii-the control system.
Bell Syst. Tech. J., 1970

Device photolithography: The primary pattern generator part i-optical design.
Bell Syst. Tech. J., 1970


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