A. Keith Bates

According to our database, A. Keith Bates authored at least 1 paper in 2001.

Collaborative distances:

• Dijkstra number of seven.
• Erdős number of six.

2001

Review of technology for 157-nm lithography.

A. Keith Bates, Mordechai Rothschild, Theodore M. Bloomstein, Theodore H. Fedynyshyn, Roderick R. Kunz, Vladimir Liberman, Michael Switkes

IBM J. Res. Dev., 2001