A. Baunemann

According to our database, A. Baunemann authored at least 1 paper in 2007.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of six.

2007

Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors.

Martin Lemberger, A. Baunemann, Anton J. Bauer

Microelectron. Reliab., 2007